GaN Based Nanomaterials Fabrication with Anodic Aluminium Oxide by MOCVD
نویسندگان
چکیده
A highly self-ordered hexagonal array of cylindrical pores has been fabricated by anodizing a thin film of Al on substrate and subsequent growth of GaN and InGaN in these nanoholes has been performed. This AAO templatebased synthesis method provides a low cost process to fabricate GaN-based nanomaterials fabrication.
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